• DocumentCode
    3752747
  • Title

    Bonding of LINBO3 thin film on Si substrate using laser irradiation

  • Author

    Hiroki Kawano;Ryo Takigawa;Hiroshi Ikenoue;Tanemasa Asano

  • Author_Institution
    Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Fukuoka, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.
  • Keywords
    "Lithium niobate","Silicon","Bonding","Radiation effects","Substrates","Plasma temperature","Crystals"
  • Publisher
    ieee
  • Conference_Titel
    Microoptics Conference (MOC), 2015 20th
  • Print_ISBN
    978-4-8634-8487-0
  • Type

    conf

  • DOI
    10.1109/MOC.2015.7416527
  • Filename
    7416527
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3752747