Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy

Author

Higotani, T. ; Kim, M.K. ; Takao, T. ; Oki, Y. ; Maeda, M.

Author_Institution

Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan

Volume

1

fYear

2001

fDate

15-19 July 2001

Abstract

Using ultraviolet laser ablation, very thin layer removal of a polymer or a glass was found to be possible by using a single laser shot. Elemental analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate samples in combination with laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.

Keywords

fluorescence spectroscopy; laser ablation; polymer films; spectrochemical analysis; surface composition; femtosecond laser ablation; glass thin layer removal; laser ablation atomic fluorescence spectroscopy; laser-induced fluorescence spectroscopy; nanometer-scale surface element analysis; polymer thin layer removal; polymethyl methacrylate; single laser shot; ultraviolet laser ablation; Atom lasers; Atomic beams; Fluorescence; Laser ablation; Laser beam cutting; Laser modes; Laser theory; Solid lasers; Spectroscopy; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-6738-3

Type

conf

DOI

10.1109/CLEOPR.2001.967713

Filename

967713