Title :
Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy
Author :
Higotani, T. ; Kim, M.K. ; Takao, T. ; Oki, Y. ; Maeda, M.
Author_Institution :
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
Abstract :
Using ultraviolet laser ablation, very thin layer removal of a polymer or a glass was found to be possible by using a single laser shot. Elemental analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate samples in combination with laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.
Keywords :
fluorescence spectroscopy; laser ablation; polymer films; spectrochemical analysis; surface composition; femtosecond laser ablation; glass thin layer removal; laser ablation atomic fluorescence spectroscopy; laser-induced fluorescence spectroscopy; nanometer-scale surface element analysis; polymer thin layer removal; polymethyl methacrylate; single laser shot; ultraviolet laser ablation; Atom lasers; Atomic beams; Fluorescence; Laser ablation; Laser beam cutting; Laser modes; Laser theory; Solid lasers; Spectroscopy; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967713
