• DocumentCode
    3757515
  • Title

    AFM system with a special quartz tuning fork probe

  • Author

    Shaoqi Chen;Liping Yan;Sitian Gao;Hequn Wang;Wei Li;Leihua Liu

  • Author_Institution
    School of information, Zhejiang Sci-tech University, Hangzhou, 310000, China
  • fYear
    2015
  • Firstpage
    60
  • Lastpage
    63
  • Abstract
    One or more probes will be used in the system of AFM, this paper mainly expounds a special shape quartz tuning fork probe whose tip stick on two parallel forks symmetrically and construct a simple AFM system by using the probe, Nano-positioning, Lock-in amplifier and so on. Then scan the outline topography and line width of a standard sample which contains a square of raster by using this system. Finally we compared the result with the result scanned by using commercial AFM and commercial scanning electron microscope (SEM). The result we measured in our experiment verified the feasibility of this system and make foundation for the next work.
  • Keywords
    "Probes","Vibrations","Amplifiers","Scanning electron microscopy","Atomic measurements"
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2015 International Conference on
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2015.7425491
  • Filename
    7425491