DocumentCode
3757515
Title
AFM system with a special quartz tuning fork probe
Author
Shaoqi Chen;Liping Yan;Sitian Gao;Hequn Wang;Wei Li;Leihua Liu
Author_Institution
School of information, Zhejiang Sci-tech University, Hangzhou, 310000, China
fYear
2015
Firstpage
60
Lastpage
63
Abstract
One or more probes will be used in the system of AFM, this paper mainly expounds a special shape quartz tuning fork probe whose tip stick on two parallel forks symmetrically and construct a simple AFM system by using the probe, Nano-positioning, Lock-in amplifier and so on. Then scan the outline topography and line width of a standard sample which contains a square of raster by using this system. Finally we compared the result with the result scanned by using commercial AFM and commercial scanning electron microscope (SEM). The result we measured in our experiment verified the feasibility of this system and make foundation for the next work.
Keywords
"Probes","Vibrations","Amplifiers","Scanning electron microscopy","Atomic measurements"
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2015 International Conference on
Type
conf
DOI
10.1109/3M-NANO.2015.7425491
Filename
7425491
Link To Document