DocumentCode
375845
Title
Three-dimensional micro-fabrication with two-photon and single-photon polymerization
Author
Kawata, S.
Author_Institution
Dept. of Appl. Phys., Osaka Univ., Japan
Volume
1
fYear
2001
fDate
15-19 July 2001
Abstract
The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a micro-spring; a self-grown filament by the single photon process; self-merging of two fibers, and splitting into many fibers; and a photopolymer photonic crystal from the top and side views.
Keywords
micro-optics; micromechanical devices; optical fabrication; optical fibre fabrication; optical polymers; photonic band gap; polymerisation; scanning electron microscopy; two-photon processes; 10 micron; SEM images; bull; fibers; instrumentation; micro-spring; photopolymer photonic crystal; self-grown filament; self-merging; single-photon polymerization; three-dimensional micro-fabrication; two-photon polymerization; Laser beams; Micromechanical devices; Nonlinear optics; Optical device fabrication; Optical microscopy; Optical polymers; Photonic crystals; Resins; Scanning electron microscopy; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-6738-3
Type
conf
DOI
10.1109/CLEOPR.2001.967843
Filename
967843
Link To Document