Widely tunable micromachined optical filter with adjustable tuning characteristics

Author

Lin, Chien-chung ; Fu, Junxian ; Harris, James S., Jr.

Author_Institution

Solid State & Photonics Lab., Stanford Univ., CA, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

298

Abstract

We designed a new tunable filter with a top DBR structure of Al ₂O₃/GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter

Keywords

alumina; gallium arsenide; micro-optics; micromachining; optical communication equipment; optical design techniques; optical tuning; optical waveguide filters; spectral line breadth; wavelength division multiplexing; Al₂O₃-GaAs; Al₂O₃/GaAs; adjustable tuning characteristics; broad tuning range optical filter; excess nitride; flexible structure; mechanical measurements; narrow linewidth; optical measurements; top DBR structure; tuning characteristics; widely tunable micromachined optical filter; Biomembranes; Distributed Bragg reflectors; Etching; Gallium arsenide; Laser tuning; Leg; Optical filters; Optical tuning; Tunable circuits and devices; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE

Conference_Location

San Diego, CA

ISSN

1092-8081

Print_ISBN

0-7803-7105-4

Type

conf

DOI

10.1109/LEOS.2001.969293

Filename

969293