Title :
A method to measure displacement of microscale structures with high resolution and large stroke for cellular characterization
Author :
Hirotaka Sugiura;Shinya Sakuma;Makoto Kaneko;Fumihito Arai
Author_Institution :
Dept. of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chilisa-ku, 464-8603, JAPAN
Abstract :
We propose a method to measure displacement of microscale structures with high sensing resolution and large stroke on focal plane of microscopy. Using this method, measurable displacement become approximately 10 times larger than that of the conventional method, and the resolution is kept as small as tens nm order.
Keywords :
"Image resolution","Sensors","Gray-scale"
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2015 International Symposium on
DOI :
10.1109/MHS.2015.7438287
