Search of the best slot rate of the slot addition type PZT actuator in a hollow tube micro pump

Development of a micro fluid system is doing in recent years. A general micro fluid system, a flow channel and the pump part, other, it´s separated. So miniaturization is difficult. As the countermeasure, the flow pass part and the pump part, technology of the hollow tube micro pump with which I united is applied. Ring type PZT is arranged to the needle top by applying the technology. Therefore a needle makes itself work as a pump. By the flow experiment, liquid transport in the tube of the hollow tube micro pump has been confirmed. Though, the flow rate through the tube is very small.Therefore, due to the radial direction of the deformation increase in the amount of ring type PZT, it is necessary to pump performance improvement. Check on the analysis that the amount of deformation increase is by adding a trench on the surface of the ring type PZT. However Optimization contributing trench condition deformation amount is not performed. Therefore, in order in this study to further improvement of the pump performance. The use of FEM analysis for ring type PZT, which went to a put a trench. Is one of the trench conditions, attention is focused on the trench rate. First, the static structural analysis is carried out to search for the best trench proportions. Then the modal analysis, the best trench ratio model and confirms the natural frequency. And performs frequency response analysis, and confirms the amount of deformation caused by each frequency. To target model which is arranged a PZT on the titanium tube. It will be fluid and the pump portion of the hollow tube micro pump. This is the evaluation value the amount of deformation and the generative force in the radial direction of the titanium tube inner surface. Most pump performance is I do the best percentage of the search to improve,