Frequency responses of on-chip pressure sensor with different deformation chambers

The frequency responses of a previously proposed on-chip pressure sensor is investigated with two different sizes of deformation chamber. Pressure inputs with the same span of frequencies, from 1 Hz to 64 Hz, are applied to the fabricated pressure sensors, and the pressure sensed by the on-chip sensor is represented by the movement of microbeads inside the sensing area. We found that the sensor with a larger deformation chamber leads to a greater microbeads movement where the peak-to-peak distance is around 50 μm while the one with a smaller chamber is less than 10 μm. Thus, it is concluded that a larger deformation chamber gives a better pressure resolution.