Title :
Hydrogen sensing performance of an electrophoretic deposition (EPD) based Pd/GaN Schottky diode
Author :
Wei-Cheng Chen;Huey-Ing Chen;Po-Cheng Chou;Ching-Hong Chang;Yung-Jen Chiou;Wen-Chau Liu
Author_Institution :
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 1 University Road, Tainan 70101, Taiwan, ROC
Abstract :
In this work, an interesting Pd/GaN Schottky diode-type hydrogen sensor, prepared by electrophoretic deposition (EPD) method, is fabricated and investigated. The studied device shows a high sensing response of 6.67×104 when exposing to a 1% H2/air gas at 100°C, and also detect even as low as 50 ppm H2/air gas. Moreover the studied device shows short response time and recovery time as 10 and 82 s, respectively, when exposing to a 1% H2/air gas at 150°C. Based on these excellent properties, the studied device gives a promise for high-performance hydrogen sensing applications.
Keywords :
"Hydrogen","Temperature sensors","Time factors","Schottky diodes","Metals","Temperature measurement"
Conference_Titel :
Sensing Technology (ICST), 2015 9th International Conference on
Electronic_ISBN :
2156-8073
DOI :
10.1109/ICSensT.2015.7438422