Title :
White light triangulation sensor for flexible inspection system
Author :
Abraham Mario Tapilouw;Yi-Wei Chang;Hsiao-Wei Liu;Hau-Wei Wang;Hung-Ming Tai
Author_Institution :
Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu City, Taiwan
Abstract :
A triangulation sensor containing two light sources with different wavelength and individual slit has been developed. Differential technique is applied to improve spatial resolution as performing height reconstruction of a specimen. The system can measure up to 7 mm with accuracy up to 1.144 um. Robotic arm with multiple degrees of freedom can be employed as the motion platform to increase flexibility of inspection.
Keywords :
"Robot sensing systems","Coordinate measuring machines","Light sources","Pistons","Position measurement","Cameras"
Conference_Titel :
Sensing Technology (ICST), 2015 9th International Conference on
Electronic_ISBN :
2156-8073
DOI :
10.1109/ICSensT.2015.7438499
