Title :
Highly efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas
Author :
Razhev, A.M. ; Bagayev, S.N. ; Zhupikov, A.A.
Author_Institution :
Inst. of Laser Phys., Acad. of Sci., RAS, Novosibirsk, Russia
Abstract :
The modified high-voltage excitation circuit of LC-inverter type providing high specific pump power in a very short time interval has been created. The use of this scheme allowed achieving excellent results of radiation energy and efficiency for ArF and KrF excimer lasers Using He as a buffer gas.
Keywords :
argon compounds; discharges (electric); excimer lasers; krypton compounds; optical pumping; ArF; ArF excimer lasers; He; He buffer gas; KrF; KrF excimer lasers; LC-inverter type; efficient electric-discharge excimer lasers; high specific pump power; modified high-voltage excitation circuit; radiation energy; very short time interval; Circuits; Gas lasers; Helium; Inductance; Laser excitation; Laser theory; Optical pulses; Pump lasers; Switches; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.970809
