Title :
Integrated tapered MMI couplers in the silicon-on-insulator technology
Author :
Hongzhen Wei ; Jinzhong Yu ; Zhongli Liu ; Hongzhi Ma ; Guohua Li ; Xiaofeng Zhang ; Liangchen Wang
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Abstract :
The authors have designed and fabricated 2/spl times/2 parabolically tapered MMI coupler with large cross-section and large space between difference ports using silicon-on-insulator (SOI) technology. The devices demonstrate a minimum uniformity of 0.8 dB and 30% shorter than the straight MMI coupler.
Keywords :
integrated optics; light interference; optical couplers; optical design techniques; optical fabrication; silicon-on-insulator; 2/spl times/2 parabolically tapered MMI coupler design; 2/spl times/2 parabolically tapered MMI coupler fabrication; difference ports; integrated tapered MMI couplers; large space; minimum uniformity; silicon-on-insulator technology; Couplers; Coupling circuits; Etching; Integrated circuit technology; Interference; Optical design; Optical waveguide theory; Optical waveguides; Silicon on insulator technology; Space technology;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.970924
