Title :
Fabrication of three-dimensional photonic crystals by holographic lithography
Author :
Ono, Y. ; Ikemoto, K.
Author_Institution :
Graduate Sch. of Sci. & Eng., Ritsumeikan Univ., Shiga, Japan
Abstract :
An incident condition for interference waves to fabricate a desired photonic crystal is led by considering that the interference fringe equation for multi beams is equivalent to the equation between lattice and reciprocal lattice vectors.
Keywords :
holographic interferometry; optical fabrication; photolithography; photonic band gap; fabrication; face-centered cubic lattice; four-wave interference; holographic interference; holographic lithography; incident condition; interference fringe equation; interference waves; light intensity distribution; multibeams; reciprocal lattice vectors; three-dimensional photonic crystals; Dielectrics; Equations; Fabrication; Holography; Interference; Lattices; Lithography; Photonic crystals; Physics; Solid state circuits;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.970977
