Optimization of parameters for deposition of SnO2 films by sol-gel using Taguchi method

Transparent conductive SnO₂ films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of Tin (II) ions, annealing temperature and pre-annealing temperature. By employing the analysis of variance, we found that the annealing temperature and the precursor are the most influencing parameters on the properties of SnO₂ films. Under the optimized deposition conditions, the SnO₂ films showed high crystal quality, and high transmittance of 80% in the visible region.