Study on compositionally graded epitaxial barium strontium titanate thin films derived from pulsed laser deposition

Author

Lu, S.G. ; Zhu, X.H. ; Mak, C.L. ; Wong, K.H. ; Chan, H.L.W.

Author_Institution

Dept. of Appl. Phys., Hong Kong Polytech., Kowloon, China

Volume

1

fYear

2001

fDate

2001

Firstpage

338

Abstract

Epitaxial gradient barium strontium titanate (Ba_xSr_1-x)TiO₃ (x=0.75, 0.8, 0.9, 1.0) thin films were prepared by the pulsed laser deposition method on the (La_0.7Sr_0.3)MnO₃ (LSMO)/LaAlO₃ (LAO) substrate. Their epitaxial structure was characterized via x-ray diffraction (XRD). The gradient change of composition is determined by the energy dispersive X-ray analysis (EDAX). P-E loops were obtained. The dielectric properties in the frequency ranging from 100 Hz to 100 kHz were measured using an impedance analyzer. Results indicated that the epitaxial structure has good dielectric properties

Keywords

X-ray chemical analysis; X-ray diffraction; barium compounds; dielectric polarisation; dielectric thin films; epitaxial layers; functionally graded materials; permittivity; pulsed laser deposition; strontium compounds; 100 Hz to 100 kHz; BaSrTiO₃; La_0.7Sr_0.3MnO₃; LaAlO₃; P-E loops; XRD; compositionally graded films; dielectric constant; energy dispersive analysis; epitaxial films; impedance analyzer; pulsed laser deposition; remanent polarization; Barium; Dielectric substrates; Optical pulses; Pulsed laser deposition; Sputtering; Strontium; Titanium compounds; X-ray diffraction; X-ray lasers; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2001. APMC 2001. 2001 Asia-Pacific

Conference_Location

Taipei

Print_ISBN

0-7803-7138-0

Type

conf

DOI

10.1109/APMC.2001.985656

Filename

985656