Multifunctional tactile sensors using MEMS cantilevers

A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.