• DocumentCode
    3770916
  • Title

    Graphene synthesis from poly(methyl methacrylate) by microwave plasma treatment at low temperature

  • Author

    Takatoshi Yamada;Masatou Ishihara;Yuki Okigawa;Masataka Hasegawa

  • Author_Institution
    National Institute of Advanced Industrial Technology, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
  • fYear
    2014
  • fDate
    7/1/2014 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A low temperature synthesis of graphene from poly(methyl methacrylate) by surface wave microwave plasma treatment was developed. Single- or double-layer graphene was formed. Raman signal mappings indicated that the obtained graphene consisted of small size of flakes and each flake connected to form continuous graphene film. In results of Hall effects measurements, the highest hole mobility was 560cm2/Vs and the lowest sheet resistance of 1000Ω/sq were obtained.
  • Keywords
    "Graphene","Optical surface waves","Surface waves","Surface treatment","Temperature measurement","Plasma temperature"
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2014 IEEE International
  • Electronic_ISBN
    2159-3531
  • Type

    conf

  • DOI
    10.1109/INEC.2014.7460442
  • Filename
    7460442