Measurement of permittivity and dissipation factor without attached electrodes

A method for measuring the permittivities of thin films, without the necessity of attaching electrodes or determining the dimensions, has been described. The results presented indicate that a precision of 0.1 percent is possible. An accuracy of better than 1 percent is probable. Excellent results were obtained even though some of the specimens occupied 10 percent or less of the electrode spacing. Excellent results were also obtained for dissipation factor. Insufficient data are available to permit an estimate of the precision and accuracy obtainable.