DocumentCode
3772145
Title
Ellipsometry and its use in high voltage applications
Author
A.-R. M. Zaghloul;R. M. Radwan;M. Elshazly-Zaghloul
Author_Institution
Electrical Engineering Department, Faculty of Engineering, Cairo University, Egypt
fYear
1978
fDate
6/1/1978 12:00:00 AM
Firstpage
103
Lastpage
105
Abstract
Ellipsometry is a technique that uses a light beam to probe the surface or volume under test. It is a very accurate technique to measure the complex dielectric constant ε* (= square of refractive index) of materials, and the thicknesses of overlaying films and their ε*´s.
Keywords
"Films","Pollution measurement","Substrates","Reflection","Surface contamination","Ellipsometry","Thickness measurement"
Publisher
ieee
Conference_Titel
Electrical Insulation, 1978 IEEE International Conference on
Print_ISBN
978-1-5090-3121-4
Type
conf
DOI
10.1109/EIC.1978.7463605
Filename
7463605
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