Analysis of variable substrate properties effects on electric field distribution in MEMS EVA tunable filters

Micro Electro Mechanical Systems (MEMS) are systems based on a diversity of technologies whereby tiny mechanical elements with excellent system properties can be implemented. The substrate properties such as relative permittivity, relative permeability and electrical conductivity is varied and its effects on electric field distribution, displacement and potential is analyzed in MEMS EVA tunable filters. The substrate properties have direct effect on the electric field distribution. The validation of scattering parameters is done which indicates a shift in the resonant frequency. As we varies the substrate properties the displacement and potential remains constant.