Comparative analysis on the temperature characteristic of three type support beams in MEMS resonator structure

With the commercialization of micro devices, abnormal working environment, especially such as temperature, becomes the important factor that affects on precision and reliability of components. To verify the temperature variation regularity, this paper discusses and compares three types of MEMS resonators, whose movable structures are respectively supported by clamped-clamped beam, crab-leg beam and folded beam. The temperature test platform is built and the tests of typical temperature sensitive structure are conducted. The results show that under the effect of environmental temperature, the resonance frequency of three types resonators also increases with the decrement of temperature linearly. And the temperature sensitivity becomes higher with bigger rigidity of the beam. Additionally, stress relief capacity of folded beam is the best.