220GHz on-wafer measurement based on TRL calibration method

This paper introduced a thru-reflect-line (TRL) calibration standard design for on-wafer measurement. The calibration kits were simulated and fabricated on Indium Phosphide (InP) substrate. The calibration kits covered a range of frequencies from 70 to 220 GHz. On-wafer calibration performed with the microstrip transmission line style contacts was described in this work . The calibration is sufficient to extract reliable device data from measurements. This paper also described a thru de-embedding method . This method show reasonable performance up to 60 GHz. Thru de-embedding method and TRL calibration are compared with the simulated transmission lines up to 220 GHz. The measurement result with TRL calibration method shows good agreement with the simulation result.