Structural optimization of a symmetric decoupled silicon micro-gyroscope

The quadrature error analysis, structure design and simulation of a symmetric decoupled silicon micro-gyroscope with high decoupling performance are present in the paper. The improvements of straight beam, the anchor and the balance beam greatly restrained the mechanical error. In the drive mode, the maximum displacement of the sense framework along the sense axis is 0.088% of the vibration amplitude of the proof mass. It almost decreases 15 times relative to the early structure. In the sense mode, the maximum displacement of the proof mass along the drive axis is 0.041% of the vibration amplitude of the proof mass. It almost decreases 20 times relative to the early structure.