Title :
A system of continuous particles monitoring using virtual impactor
Author :
Sun Jianwen; Yang Kun; Liu Zewen; Lu Yanwu
Author_Institution :
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
fDate :
7/1/2015 12:00:00 AM
Abstract :
This paper presents a continuous particles monitoring system integrated microfabricated virtual impactor with commercial particle sensor. The virtual impactor was designed to separate the particles with diameter less than 2.5μ m and microfabricated by using multilayer dry film photoresist with total size of 15mm*20mm and 400 μm in height. The particle sensor integrated with virtual impactor was to detect particle number concentrations indoors and outdoors. From the experiment results show that the system will from a portable sensor for continuous particle monitoring.
Keywords :
"Atmospheric measurements","Particle measurements","Monitoring","Micromechanical devices","Electric variables measurement","Biomedical monitoring","Lenses"
Conference_Titel :
Electronic Measurement & Instruments (ICEMI), 2015 12th IEEE International Conference on
DOI :
10.1109/ICEMI.2015.7494466
