A 7GHz PNP transistor for complementary bipolar LSI

Recently a complementary bipolar transistor LSI´s have been investigated. These LSI´s concept features high speed switching and low power dissipation. However the speed has been considerably limited by the low performance of the integrated PNP transistor. This paper describes the fabrication results of a 7GHz vertical PNP transistor and its integrated logic circuits. By the presented process called SST4, the vertical PNP and NPN transistor can be fabricated on one chip. Measured propagation delay time is reached in 270ps/gate with power dissipation of 400μw.