The study of 2.45 GHz atmospheric microwave plasma generator

Atmospheric pressure microwave plasma has potential been wildly applied to the experiment and industry. But the equipment of the microwave plasma is not easy to control. In order to make it easier to control, we simulated three adjustable parts to figure their effects out. In this paper, we introduced the structure of the microwave plasma generator, and studied the effects of three parts of the structure by simulation, and measured by the Agilent vector network analyzer (VNA) E50618 10MHz-3GHz. From the simulation and the measurement result, we can get some rules and conclusions of the microwave plasma generator.