DocumentCode
3780827
Title
Properties of tantalum oxide formed on sputtered tantalum
Author
R. W. Berry;D. J. Sloan
Author_Institution
Bell Telephone Laboratories, Inc. Murray Hill, New Jersey
fYear
1958
Firstpage
35
Lastpage
36
Abstract
Tantalum has been sputtered onto glass microscope slides to form films of tantalum in the thickness range of from 4000 to 10000 Angstrom units. These films, whose surfaces are nearly optically flat, provide a very smooth material, which has had no mechanical or chamical polishing, on which anodically formed tantalum oxide may be investigated.
Keywords
"Tantalum","Films","Resistance","Gold","Radiation detectors","Electrodes","Conductivity"
Publisher
ieee
Conference_Titel
Electrical Insulation, 1958 Conference On
Print_ISBN
978-1-5090-3135-1
Type
conf
DOI
10.1109/CEI.1958.7513546
Filename
7513546
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