• DocumentCode
    3781253
  • Title

    Humidity sensor with graphene oxide as sensing material

  • Author

    Xiaoxu Kang;Qingyun Zuo;Chao Yuan;Weijun Wang;Meng Gao;Liangliang Jiang;Yongxing Zhou;Yong Wang;Shoumian Chen;Yuhang Zhao;Jia Liu;Wenjie Sheng;Jia Zhou

  • Author_Institution
    Process Technology Department, Shanghai IC R&D Center, Shanghai, 201210, China
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Humidity sensor can found wide application in industry, automobile and consumer electronics. In this work, capacitive humidity sensor structure was designed and fabricated on 200mm CMOS BEOL Line. BEOL Al was used as electrode with comb/serpent structure, and graphene oxide (GO) was used as humidity sensing material. Result shows that GO based humidity sensor has high sensitivity, faster recovery time and good linearity performance. Based on the sensor structure, prototype humidity sensor was built by PCB-level integration with dedicated readout ASIC and display/calibration module, and the output data can well match that of standard humidity product.
  • Keywords
    "Humidity","Prototypes","Standards","Graphene","Sensors","CMOS integrated circuits","Electrodes"
  • Publisher
    ieee
  • Conference_Titel
    ASIC (ASICON), 2015 IEEE 11th International Conference on
  • Print_ISBN
    978-1-4799-8483-1
  • Electronic_ISBN
    2162-755X
  • Type

    conf

  • DOI
    10.1109/ASICON.2015.7517016
  • Filename
    7517016
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3781253