System-level modeling and analysis of third order MEMS accelerometer

MEMS technology has been applied to the fields of deep oil exploration, seismic detection. Many of researches for improving the performance of MEMS acceleration sensor had been put forward. In this paper, an effective way for design of feed-forward sigma-delta for MEMS acceleration sensor is proposed. Furthermore, the simulation model is designed successfully under idea environment in MATLAB, which can not indicate it can reach the same performance in real environment after taped out. Therefore, the useful model parameters which had been verified by taped out can be the most valuable parameters for MEMS readout design. In this paper, the work shows an optimized parameters design with signal to noise ration (SNR) of 130dB and its experimental result can reach 125dB.