Title :
MEMs activity at Rochester Institute of Technology
Author :
L. Fuller;A. Pham;P. Merwah
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
Rochester Institute of Technology has been working in the Microelectromechanical Systems (MEMs) area since 1990. A graduate/senior level course in MEMs has been taught each year since 1995. Senior projects, masters thesis and research projects have been completed that relate to materials, processes, devices, sensors, actuators and related MEMs devices. This paper will describe this work and present an overview of the MEMs course.
Keywords :
"Micromechanical devices","Wet etching","Electrostatic actuators","Silicon","Biosensors","Laboratories","Microelectromechanical devices","Micromotors","Sensor phenomena and characterization","Biological materials"
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Print_ISBN :
0-7803-5240-8
DOI :
10.1109/UGIM.1999.782841
