• DocumentCode
    3782259
  • Title

    A study of crystal defects in radiation detector grade semi-insulating GaAs

  • Author

    D. Korytar;C. Ferrari;S. Strzelecka;A. Satka;J. Darmo;F. Dubecky;A. Hruban

  • Author_Institution
    Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
  • fYear
    1998
  • Firstpage
    331
  • Lastpage
    334
  • Abstract
    Crystal defects in semiconducting materials can play a crucial role in electrical parameters and performance of devices. In this work, detector grade bulk SI GaAs wafers of various producers have been examined by several characterisation techniques with the aim to compare their crystal perfection and to correlate the observed structural properties with the detecting properties of fabricated detectors. Three types of dislocation distribution by X-ray topography and etching have been identified in bulk SI GaAs materials: (i) dislocation-free, (ii) slip-like, and (iii) cellular structure. [004] rocking curves half-width have been measured to compare the overall crystal perfection of wafers, too. Microprecipitates were studied by infrared light scattering tomography. Collection efficiency and energy resolution of radiation detectors manufactured from the bulk SI GaAs wafers showed strong dependence on substrate quality. Homogeneity of the detector charge collection was investigated by the scanning EBIC.
  • Keywords
    "Radiation detectors","Gallium arsenide","Crystalline materials","Semiconductivity","Semiconductor materials","Surfaces","Etching","Biological materials","Light scattering","Tomography"
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 1998. (SIMC-X) Proceedings of the 10th Conference on
  • Print_ISBN
    0-7803-4354-9
  • Type

    conf

  • DOI
    10.1109/SIM.1998.785137
  • Filename
    785137