DocumentCode :
3782606
Title :
Resolving power of the Gaussian pupil optical lithography system beyond Rayleigh´s limit of resolution
Author :
Young Ran Song; Min Hee Lee; Sang Soo Lee
Author_Institution :
Dept. of Phys., Inha Univ., Inchon, South Korea
Volume :
2
fYear :
1999
Firstpage :
350
Abstract :
In order to obtain resolution higher than Rayleigh´s limit of resolution /spl epsi//sub R/, we use Gaussian pupil which gives the diffraction intensity distribution with resolution /spl epsi//sub G/
Keywords :
"Lithography","Diffraction","Image resolution","Physics","Equations","Radio access networks","Erbium","Fourier transforms","Gold","Optical imaging"
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO/Pacific Rim ´99. The Pacific Rim Conference on
Print_ISBN :
0-7803-5661-6
Type :
conf
DOI :
10.1109/CLEOPR.1999.811463
Filename :
811463
Link To Document :
