DocumentCode :
3782608
Title :
ULE beamline optics
Author :
V.M. Benveniste;P. Kellerman;M.A. Graf
Author_Institution :
Semicond. Equipment Div., Eaton Corp., Beverly, MA, USA
Volume :
1
fYear :
1999
Firstpage :
432
Abstract :
A beamline was developed specifically for production and transport of high perveance ion beams. Space charge effects are addressed at three stages of the beamline: extraction system, mass resolver and target interface. A large cross-section ion beam is extracted from a large area quiescent plasma by a fixed geometry pentode, and is injected into a 135 degree dipole magnet for mass dispersion. This magnet incorporates surface coils to produce independently adjustable quadrupole fields to accommodate variable space charge defocusing effects. The beam then passes through an adjustable width mass resolving slit that is combined with it post accel (or decel) gap, and finally traverses a plasma cell on its way to the target, for complete self regulating target neutralization. Design philosophy is presented with first order transport properties.
Keywords :
"Optical beams","Ion beams","Space charge","Plasma transport processes","Particle beam optics","Production","Geometrical optics","Coils","Particle beams","Plasma properties"
Publisher :
ieee
Conference_Titel :
Ion Implantation Technology Proceedings, 1998 International Conference on
Print_ISBN :
0-7803-4538-X
Type :
conf
DOI :
10.1109/IIT.1999.812146
Filename :
812146
Link To Document :
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