• DocumentCode
    3782608
  • Title

    ULE beamline optics

  • Author

    V.M. Benveniste;P. Kellerman;M.A. Graf

  • Author_Institution
    Semicond. Equipment Div., Eaton Corp., Beverly, MA, USA
  • Volume
    1
  • fYear
    1999
  • Firstpage
    432
  • Abstract
    A beamline was developed specifically for production and transport of high perveance ion beams. Space charge effects are addressed at three stages of the beamline: extraction system, mass resolver and target interface. A large cross-section ion beam is extracted from a large area quiescent plasma by a fixed geometry pentode, and is injected into a 135 degree dipole magnet for mass dispersion. This magnet incorporates surface coils to produce independently adjustable quadrupole fields to accommodate variable space charge defocusing effects. The beam then passes through an adjustable width mass resolving slit that is combined with it post accel (or decel) gap, and finally traverses a plasma cell on its way to the target, for complete self regulating target neutralization. Design philosophy is presented with first order transport properties.
  • Keywords
    "Optical beams","Ion beams","Space charge","Plasma transport processes","Particle beam optics","Production","Geometrical optics","Coils","Particle beams","Plasma properties"
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology Proceedings, 1998 International Conference on
  • Print_ISBN
    0-7803-4538-X
  • Type

    conf

  • DOI
    10.1109/IIT.1999.812146
  • Filename
    812146