• DocumentCode
    3782812
  • Title

    Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters

  • Author

    D. Randjelovic;Z. Djuric;R. Petrovic;Z. Lazic;T. Dankovic

  • Author_Institution
    Inst. of Microelectron. Technol. & Single Crystals, Belgrade Univ., Serbia
  • Volume
    2
  • fYear
    2000
  • Firstpage
    595
  • Abstract
    This paper presents the design and fabrication technique of a test structure with p/sup +/Si/metal and p/sup +/Si/sputtered-Si thermopiles intended for optimization of performance of multilayer thermopile IR detectors and thermal converter. An experimental structure is fabricated using micromachining techniques.
  • Keywords
    "Nonhomogeneous media","Fabrication","Testing","Temperature sensors","Thermal sensors","Gold","Temperature dependence","Semiconductor device measurement","Silicon","Infrared detectors"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
  • Print_ISBN
    0-7803-5235-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.2000.838761
  • Filename
    838761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3782812