Title :
Glass technology for MMIC
Author :
W. Jablonski;J. Szczesny
Author_Institution :
Inst. of Electron Technol., Warsaw, Poland
Abstract :
A new approach to the design of microwave monolithic integrated circuits (MMIC) is presented in this paper. The technology uses thick glass layers on the silicon in order to reduce parasitic capacitance introduced by metallic layers deposited on the dielectric layer of the MMIC. It was applied to construct a microwave monolithic switch with a single input and three outputs.
Keywords :
"Glass","Silicon","Switches","Etching","Microwave technology","Integrated circuit technology","Monolithic integrated circuits","Parasitic capacitance","Dielectrics","MMICs"
Conference_Titel :
Microwaves, Radar and Wireless Communications. 2000. MIKON-2000. 13th International Conference on
Print_ISBN :
83-906662-3-5
DOI :
10.1109/MIKON.2000.913891
