Title :
Micromechanical coplanar waveguide compatible with pseudomorphic AlGaAs/InGaAs/GaAs based HFETs
Author :
M. Tomaska;T. Lalinsky;M. Krnac;M. Klasovity;Z. Mozolovad;S. Hascik;I. Kostic
Author_Institution :
Fac. of Electr. Eng., Slovak Tech. Univ., Bratislava, Slovakia
fDate :
6/23/1905 12:00:00 AM
Abstract :
The design, fabrication and characterization of microwave transmission structure on thin composite semiconductor/dielectric substrate technologically compatible with pseudomorphic HFETs for a micromechanical microwave transmitted power sensor are discussed.
Keywords :
"Micromechanical devices","Coplanar waveguides","Semiconductor waveguides","Fabrication","Dielectric substrates","Microwave technology","HEMTs","MODFETs","Sensor phenomena and characterization","Microwave sensors"
Conference_Titel :
Electron Devices for Microwave and Optoelectronic Applications, 2001 International Symposium on
Print_ISBN :
0-7803-7049-X
DOI :
10.1109/EDMO.2001.974309
