DocumentCode :
3784125
Title :
Focus on manufacturing microsystems as a further step of appropriate CAD design
Author :
M. Szermer;M. Daniel;K. Slusarczyk;A. Napieralski
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
fYear :
2001
fDate :
6/23/1905 12:00:00 AM
Firstpage :
195
Lastpage :
197
Abstract :
Silicon microsystems are one of the most recently developed branches of microelectronics. They are connected with very fast microelectronic technology development, increasing accuracy of technological process, which allows manufacturing in the nanometer ranges. There are some standards of CAD software that offer a wide range of tools necessary to design the silicon chips. As an example the CADENCE environment is presented in this paper which is one of the most popular standards nowadays. Of course the designer has to respect some technological rules during the design process. Every physical technology process is connected with appropriate design kit in which the design rules of the technology are enclosed.
Keywords :
"Computer aided manufacturing","Design automation","Infrared sensors","Microelectronics","Gas detectors","Silicon","Process design","Micromechanical devices","Etching","Circuits"
Publisher :
ieee
Conference_Titel :
CAD Systems in Microelectronics, 2001. CADSM 2001. Proceedings of the 6th International Conference. The Experience of Designing and Application of
Print_ISBN :
966-553-079-8
Type :
conf
DOI :
10.1109/CADSM.2001.975805
Filename :
975805
Link To Document :
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