High accuracy piezoelectric-based microrobot for biomedical applications

Today, the use of robots for self acting tasks in applications ranging from biology and medicine to microsystems technology demand miniaturized dimensions and high-precision handling techniques. Transport and manipulation of biological cells or assembly of micromechanical parts are the best-suited applications for microrobots with sizes about cm/sup 3/. The kind of actuator used for locomotion is a crucial part when a miniaturised robot for micropositioning and micromanipulating is developed. Demands on low cost, high resolution and small size make piezoceramic actuators an attractive alternative. A "Smart Piezoactuator Unit" (SPU) has been developed and will be used in a new generation of microrobots with a size of a few cm/sup 3/. The main characteristics of this "Smart Piezoactuator Unit" are presented in this paper. An integrated circuit containing power drivers and a digital control system with a fast serial interface protocol has been designed. Integrating this circuit close to the piezoceramic actuators results in a compact and a minimal number of connecting wires to the robot.