DocumentCode
378561
Title
Calculation and optical measurement of SAW diffraction pattern of slanted finger SAW filters on YZ LiNbO3 and 128YX LiNbO3
Author
Yatsuda, H. ; Kamiseki, S. ; Chiba, T.
Author_Institution
Japan Radio Co. Ltd., Saitama, Japan
Volume
1
fYear
2001
fDate
2001
Firstpage
13
Abstract
The main purpose of the present paper is to investigate diffraction effects on SAW filters using slanted finger interdigital transducers (SFITs). Theoretical and experimental results of diffraction patterns of SFIT SAW filters on two different substrates, YZ LiNbO3 and 128YX LiNbO3 are presented. The calculated diffraction patterns are obtained using the angular spectrum of plane wave theory. The measured diffraction patterns are obtained using a heterodyne interferometer-type laser probe method. Good agreements between theoretical and experimental results are obtained
Keywords
interdigital transducers; light interferometry; lithium compounds; measurement by laser beam; surface acoustic wave filters; 128YX substrates; LiNbO3; SAW diffraction pattern; YZ substrates; angular spectrum; heterodyne interferometer-type laser probe method; interdigital transducers; plane wave theory; slanted finger SAW filters; Fingers; Laser theory; Optical diffraction; Optical filters; Optical interferometry; Optical mixing; Probes; SAW filters; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2001 IEEE
Conference_Location
Atlanta, GA
Print_ISBN
0-7803-7177-1
Type
conf
DOI
10.1109/ULTSYM.2001.991568
Filename
991568
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