Title :
Investigation of surface acoustic wave scattering effects
Author :
Hesjedal, T. ; Behme, G.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
Abstract :
We present measurements of surface acoustic wave (SAW) scattering from single dots, periodic and locally disturbed two-dimensional dot arrays. By using the scanning acoustic force microscope (SAFM), SAW fields of arbitrary polarization can be imaged with submicron spatial resolution and sub-Å wave amplitude sensitivity. The influence of a wavelength-sized single dot on SAW diffraction is studied. Forward- and back-scattered wave components can be imaged by insonifying the dot with a pump and a probe beam under different angles. SAW diffraction images of a regular dot array reveal a wavefield that is localized around the dots. In case of a disturbed scattering array, the localized SAW pattern vanishes in the vicinity of the distortion
Keywords :
acoustic microscopy; acoustic wave diffraction; acoustic wave scattering; backscatter; surface acoustic waves; SAW diffraction; SAW fields; arbitrary polarization; back-scattered wave components; different angles; disturbed scattering array; forward-scattered wave components; localized SAW pattern; locally disturbed two-dimensional dot arrays; periodic dot arrays; probe beam; scanning acoustic force microscope; single dots; sub-angstrom wave amplitude sensitivity; submicron spatial resolution; surface acoustic wave scattering effects; wavefield; Acoustic arrays; Acoustic diffraction; Acoustic measurements; Acoustic scattering; Acoustic waves; Microscopy; Polarization; Spatial resolution; Surface acoustic waves; Wavelength measurement;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991597
