DocumentCode :
378583
Title :
Leaky surface acoustic waves on langasite with thin dielectric films
Author :
Kakio, Shoji ; Yamaguchi, Tamie ; Nakagawa, Yasuhiko
Author_Institution :
Fac. of Eng., Yamanashi Univ., Kofu, Japan
Volume :
1
fYear :
2001
fDate :
2001
Firstpage :
165
Abstract :
The propagation characteristics of leaky surface acoustic waves on rotated Y-cut langasite with a thin dielectric film, such as those of tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2), are investigated theoretically and experimentally, mainly in terms of the attenuation. The theoretical analysis showed that, for a certain range of the cut angle, the attenuation can be reduced by choosing the appropriate material and thickness of the film. In fact, the estimated propagation loss of the leaky surface acoustic wave on (0°, 140°, 67°)-cut langasite with RF-sputtered Ta 2O5 film decreased to approximately one-third in comparison to those of the sample without the thin film
Keywords :
dielectric thin films; gallium compounds; lanthanum compounds; sputtered coatings; surface acoustic waves; La3Ga5SiO14; RF sputtering; SiO2; Ta2O5; attenuation; dielectric thin film; langasite; leaky surface acoustic wave; propagation loss; silicon dioxide; tantalum pentoxide; Acoustic propagation; Acoustic waves; Attenuation; Dielectric films; Dielectric substrates; Dielectric thin films; Propagation losses; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
Type :
conf
DOI :
10.1109/ULTSYM.2001.991601
Filename :
991601
Link To Document :
بازگشت