Critical properties of nanoporous aerogel films from surface-wave laser ultrasound

Author

Flannery, C.M.

Author_Institution

Paul Drude Inst. for Solid State Electron., Berlin, Germany

Volume

1

fYear

2001

fDate

2001

Firstpage

471

Abstract

Nanoporous aerogel films are of great scientific and commercial interest because of their outstanding potential for application to microelectronic interconnect, associated with low dielectric constant. Of the parameters which describe such aerogel films, density/porosity and stiffness are two of the most critical but are difficult to measure. This paper shows how measurement of the dispersion of laser-generated surface acoustic wavepackets travelling on submicron-thick aerogel films on silicon substrates allows the density and Young´s modulus to be extracted reliably. A method for extracting measurements on very thin films (< 300 nm) is also presented

Keywords

Young´s modulus; aerogels; integrated circuit interconnections; nanostructured materials; permittivity; surface acoustic waves; ultrasonic applications; 300 nm; Young´s modulus; density/porosity; dielectric constant; laser-generated surface acoustic wavepackets; microelectronic interconnect; nanoporous aerogel films; stiffness; surface-wave laser ultrasound; Acoustic measurements; Density measurement; Dielectric constant; Dielectric measurements; Dispersion; Microelectronics; Nanoporous materials; Semiconductor films; Surface acoustic waves; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991666

Filename

991666