Evaluation of surface acoustic wave motor stepping motion

Utilizing nanometer vibration of surface acoustic wave for friction drive enables nanometer stepping drives of a surface acoustic wave motor. Number of driving waves varied step displacement readily, and decrease of driving waves brought about 2 nm step motion as a minimum step of an experimental setup. We proposed a simulation model so as to control step displacement at open loop condition. The simulation model represented the characteristic transient response of the surface acoustic wave motor, and it can be applied to an open loop control of a rigid structural surface acoustic wave motor. However, the experimental setup did not have enough rigidity. Accurate simulation of the experimental setup requires taking elastic deformations into consideration. We, therefore, proposed a mechanical equivalent circuit model that takes accounts of compliance of the structure