• DocumentCode
    3786342
  • Title

    MEMS and NEMS - systems, devices, and structures

  • Author

    S.E. Lyshevski

  • Author_Institution
    CRC Press LLC
  • Volume
    20
  • Issue
    4
  • fYear
    2004
  • Firstpage
    46
  • Lastpage
    46
  • Keywords
    "Micromechanical devices","Nanoelectromechanical systems","Books","Mathematical model","Micromotors","Nanobioscience","Chemistry","Fabrication","Polymers","Biomedical imaging"
  • Journal_Title
    IEEE Electrical Insulation Magazine
  • Publisher
    ieee
  • ISSN
    0883-7554
  • Type

    jour

  • DOI
    10.1109/MEI.2004.1318850
  • Filename
    1318850
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3786342