DocumentCode

3786368

Title

Correction to "Real-Time Carbon Content Control for PECVD ZrO$_2$Thin-Film Growth"

Author

D. Ni;Y. Lou;P.D. Christofides;L. Sha;S. Lao;J.P. Chang

Volume

17

Issue

3

fYear

2004

Firstpage

477

Lastpage

477

Keywords

"Transistors","Process control","Plasma materials processing","Semiconductor thin films"

Journal_Title

IEEE Transactions on Semiconductor Manufacturing

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2004.834218

Filename

1321146