DocumentCode :
3786368
Title :
Correction to "Real-Time Carbon Content Control for PECVD ZrO
$_2$
Thin-Film Growth"
Author :
D. Ni;Y. Lou;P.D. Christofides;L. Sha;S. Lao;J.P. Chang
Volume :
17
Issue :
3
fYear :
2004
Firstpage :
477
Lastpage :
477
Keywords :
"Transistors","Process control","Plasma materials processing","Semiconductor thin films"
Journal_Title :
IEEE Transactions on Semiconductor Manufacturing
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2004.834218
Filename :
1321146
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3786368
