3786616

Recent advances in semiconductor factory automation, part 2: equipment-level automation

MuDer Jeng; Mengchu Zhou; Thomas Wen-Yao Chen

National Taiwan Ocean University

11

3

2004

4

4

"Manufacturing automation","Automatic control","Marine technology","Robotics and automation","Oceans","Semiconductor device manufacture","Manufacturing industries","Technological innovation","Control systems","Dispatching"

IEEE Robotics & Automation Magazine

ieee

1070-9932

jour

10.1109/MRA.2004.1337818

1337818