Flexural plate wave excitation using bulk modes

Author

Guo, Hang ; Lal, Amit

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

799

Abstract

In this paper we present theoretical analysis and experimental verification of a method to excite standing flexural plate waves on silicon nitride thin films by using piezoelectric plates (PZT-4) attached to silicon bulk substrates. It is cost effective and compatible with membranes produced by any IC-process. In this method, the bulk modes of the silicon substrate are coupled to the membrane modes. Finite Element Method is used to analyze the longitudinal mode coupled to the membrane mode, and laser interferometer is used to measure the out-of-plane displacement of the membrane. The experimental results verified the mode shape of coupled longitudinal-membrane mode predicted by FEM calculated results, and further demonstrated that many bulk modes can be coupled to membrane modes

Keywords

bulk acoustic wave devices; finite element analysis; light interferometry; membranes; PZT; PZT-4 piezoelectric plate; PbZrO3TiO3; Si; Si₃N₄; bulk mode; coupled longitudinal-membrane mode; finite element method; flexural plate wave excitation; laser interferometry; mode shape; out-of-plane displacement; silicon bulk substrate; silicon nitride thin film; Biomembranes; Costs; Coupled mode analysis; Displacement measurement; Finite element methods; Laser modes; Optical coupling; Piezoelectric films; Semiconductor thin films; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991843

Filename

991843