• DocumentCode
    3786862
  • Title

    Guest Editorial Special Section on Microelectronics Manufacturing: Prosperity and Environmental Stewardship

  • Author

    S.P. Beaudoin;R.M. Content;L. Losey;F. Shadman

  • Volume
    17
  • Issue
    4
  • fYear
    2004
  • Firstpage
    481
  • Lastpage
    482
  • Keywords
    "Microelectronics","Semiconductor device manufacture","Chemical engineering","Manufacturing industries","USA Councils","Chemical technology","Adhesives","Manufacturing processes","Cleaning","Environmental management"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.837000
  • Filename
    1353299
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3786862