• DocumentCode
    3786863
  • Title

    Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference

  • Author

    C. Hess;L.H. Weiland

  • Volume
    17
  • Issue
    4
  • fYear
    2004
  • Firstpage
    562
  • Lastpage
    563
  • Keywords
    "Semiconductor device manufacture","Manufacturing processes","Circuit testing","Semiconductor materials","Manufacturing automation","Microelectronics","Integrated circuit yield","Components, Packaging, and Manufacturing Technology Society","Electron Devices Society","Metrology"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.835730
  • Filename
    1353311
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3786863