Integrated pressure and flow sensor in silicon-based ultrasonic surgical actuator

Author

Chen, Xi ; Lal, Amit

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

2

fYear

2001

fDate

2001

Firstpage

1373

Abstract

We report on a transducer that not only cuts tissue ultrasonically but also senses pressure and liquid flow rate during cutting. Horn-shaped silicon needles with integrated piezoresistive pressure sensors were fabricated using bulk micromachining technology. The needles were driven ultrasonically by bonded PZT-4 plates. The device can be driven at its λ/2 longitudinal resonance to cut and sense pressure, while cut tissue is aspirated through the needle by an external pump

Keywords

biocontrol; biomedical transducers; biomedical ultrasonics; elemental semiconductors; flowmeters; micromachining; microsensors; piezoelectric actuators; piezoresistive devices; pressure sensors; silicon; surgery; ultrasonic machining; ultrasonic transducers; Wheatstone bridge; bonded PZT-4 plates; bulk micromachining; cataract removal; cutting tool; diaphragm size; external pump; flow induced heat loss; flow sensitivity; horn-shaped silicon needles; integrated pressure-flow sensor; longitudinal resonance; membrane pressure sensor; microsurgical tool; ophthalmic tool; phacoemulsification; piezoresistive pressure sensors; ultrasonic surgical actuator; Actuators; Biomembranes; Bonding; Circuits; Electronics packaging; Needles; Pressure control; Silicon; Surgery; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991976

Filename

991976